Nature1mon
Lithography at EUV wavelengths
Extreme-ultraviolet (EUV) lithography at 13.5 nm is expected to be introduced in high-volume semiconductor chip production over the next three years. Research is now underway to investigate sub-10 ...
Hosted on MSN12mon
Here's what the machine that will build your next laptop CPU looks like — customers including Intel paid $350 million and waited up to six years to get their hands on it
Dutch lithography machine manufacturer ASML ... up production of its new High-NA (numerical aperture) EUV (extreme ultraviolet) machine. This system, which is around the size of a double decker ...
Nature5y
Lithography roadmap on track
Extreme UV lithography (EUVL) and 193 nm immersion lithography enhanced by double-patterning techniques will be sufficient to maintain the lithography roadmap for several technology nodes.
Hosted on MSN1mon
Russia plans EUV chipmaking tools that it says will be cheaper and easier to build than ASML's — country outlines new roadmap to smaller chips
Russia has unveiled a roadmap to develop its own lithography machines, aiming to create less costly and complex equipment than ASML's systems, according to CNews. These machines will use lasers ...
siliconsemiconductor12d
Rapidus begins installation of Japan’s first NXE:3800E EUV lithography machinery
A pilot line will begin at Rapidus’ IIM-1 in April 2025. A single-wafer process will be introduced for all manufacturing ...
scmp.com27d
How China’s award-winning EUV breakthrough sidesteps US chip ban
New approaches in the development of extreme ultraviolet (EUV) lithography are being pioneered by Chinese scientists, paving the way for the mass production of advanced semiconductor chips as ...
Gizmochina27d
China’s Semiconductor Push: From EUV Breakthroughs to Domestic Lithography
lithography is a critical technology for manufacturing semiconductor chips smaller than 7 nanometers. For years, Dutch company ASML has maintained a global monopoly on EUV machines using the laser ...