is composed of gallium (Ga) ions. The ions forming the structure of the beam are derived from a liquid metal ion source (LMIS). In the Hitachi FB-2000A FIB, the ion source is a tungsten needle that is ...

Image Credit: Hitachi High-Tech Europe Influence of the Ga-ion energy on the damage of a Si lattice. Image Credit: Hitachi High-Tech Europe This study demonstrates that using the Broad Ion Beam ...

(Image: Wikipedia Commons, CC0 1.0) FIB milling relies on the interaction between a focused beam of ions and the sample surface. The most commonly used ion source is liquid metal ion source (LMIS), ...