Deep ultraviolet (DUV) lasers, known for their high photon energy and short wavelengths, are essential in various fields such as semiconductor lithography, high-resolution spectroscopy, precision ...

Chinese electronics giant Huawei is testing elements for an extreme ultraviolet (EUV) lithography machine at its Dongguan ...

lithography involves wavelengths of 13.5 nm, and thus represents the next significant step in the reduction of feature sizes on integrated circuits. However, the move from 193 nm excimer laser ...

Since the 1980s, cutting-edge lithography has shifted from the 365 nm 'i-line' of mercury vapour lamps to deep-ultraviolet light from excimer lasers at 248 nm (krypton fluoride lasers) and 193 nm ...

Scientists from the Chinese Academy of Sciences (CAS) have reportedly made a major ‘breakthrough’ in solid-state ...

Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor ...

Deep UV solid-state laser with compact setup generates a vortex at 193 nm. Deep ultraviolet (DUV) lasers, known for their high photon energy and short wavelengths, are essential in various fields such ...