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Engineers develop first deep-UV microLED display chips for maskless photolithography
A lithography machine is crucial equipment for semiconductor manufacturing ... To overcome these challenges, the research team built a maskless lithography prototype platform and used it to ...
Optics1mon
Hong Kong UST develops first deep-UVC microLED display array for lithograhy
The work is described in a Nature Photonics paper, entitled High-Power AlGaN Deep-Ultraviolet Micro-Light-Emitting Diode Displays for Maskless Photolithography. A lithography machine is crucial ...
Design-Reuse17d
MAPPER and TSMC Take Next Step in Exploring Multiple E-beam Lithography for IC Manufacturing at 22 nanometer node and Beyond
Delft, The Netherlands / Hsinchu, Taiwan -- Ocotober 13, 2008 -- MAPPER Lithography and Taiwan Semiconductor Manufacturing Company (TSMC) signed an agreement, according to which MAPPER will ship its ...
Hackaday1y
DLP projector
Inspired by the idea of creating a maskless lithography system using a digital micromirror device (DMD), [Nemo Andrea] tore into an Anycubic Photon Ultra, DLP & resin-based 3D printer to take a ...
Hackaday1y
Assessing The Micromirror Device From A DLP Printer For Maskless Lithography Duty
Inspired by the idea of creating a maskless lithography system using a digital micromirror device (DMD), [Nemo Andrea] tore into an Anycubic Photon Ultra, DLP & resin-based 3D printer to take a ...
Nature5y
Lithography roadmap on track
Mapper will use these funds to develop a beta version of its maskless lithography ... Taiwan. The equipment includes SUSS's 300 mm lithography cluster LithoPack300 and its 300 mm bond cluster ...