Extreme ultraviolet (EUV) lithography finally is moving into production, but foundry customers now must decide whether to implement their designs using EUV-based single patterning at 7nm, or whether ...

This is also called litho-etch-litho-etch ... via processes. For years, the industry has made contacts and vias using damascene-like flows. In contacts and vias, you pattern holes on top of the ...