This study proposes the modeling and fabrication of MEMS devices based on the standard Polysilicon Multi-Users MEMS Process (PolyMUMPs) for acetone gas detection. Titanium dioxide (O2 ) nanoparticles ...

Its computational burden is much relieved to be integrated into the edge device by adopting the analog-assisted structure, where a designed readout integrated circuit (ROIC) for automatic calibration ...