Vacuum sealed chamber that contains the field emission gun. A pneumatic valve seals the gun chamber in the event of an accidental vacuum vent. This prevents dust and debris from reaching the tip.
Since the FE-SEM is in effect an electrical circuit, the specimen must be conductive. In the tungsten source SEM, any nonconductive specimen is coated with a very thin layer of conductive material in ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results