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Ammonia (NH3) plays a critical role in atmospheric chemistry and can exacerbate haze formation. Agricultural emissions have been known as a primary source of global atmospheric NH3. However, with ...
MnOx-based catalysts possess excellent low-temperature NH3 selective catalytic reduction (NH3-SCR) activity, but the poor SO2/sulfate poisoning resistance and the narrow active-temperature window ...
In order to minimize plasma-damage on porous low-k films, a pre-clean treatment, NH3 thermal reduction, to remove CuOx thin layer from a via bottom before barrier metal deposition was investigated. A ...
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