However, when the mesh size of mask fabrics is small enough to capture viruses, which are usually around one hundred nanometers in size, the fabric typically also restricts air flow, resulting in ...

In this paper, EUVL mask protection schemes proposed by Asbach were experimentally challenged against horizontal aerosol flow simulating particle transport from the side during mask handling, shipping ...

Furthermore, a flowrate measurement method for horizontal gas–water slug flow is presented based on the proposed conductance sensor with self-calibration and a Venturi tube. The experimental results ...