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Department of Chemistry, University of Durham, Science Laboratories, South Road, Durham DH1 3LE, UK. Direct telephone: (0191) 374 7491. FAX: (0191) 384 4737. E-Mail: [email protected]. Article Views ...

Abstract: Low-temperature Cu/Cu direct bonding technology using formic acid vapor in situ treatment was developed. Effect of formic acid vapor treatment conditions on Cu surface and bonding was ...