Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor ...

Deep ultraviolet (DUV) lasers, known for their high photon energy and short wavelengths, are essential in various fields such ...

Scientists from the Chinese Academy of Sciences (CAS) have reportedly made a major ‘breakthrough’ in solid-state ...

Barring a major breakthrough in lithography, chipmakers are using today’s 193nm immersion and multiple patterning for both 16/14nm and 10nm. Now, chipmakers are focusing on the lithography options for ...

lithography involves wavelengths of 13.5 nm, and thus represents the next significant step in the reduction of feature sizes on integrated circuits. However, the move from 193 nm excimer laser ...

Since the 1980s, cutting-edge lithography has shifted from the 365 nm 'i-line' of mercury vapour lamps to deep-ultraviolet light from excimer lasers at 248 nm (krypton fluoride lasers) and 193 nm ...

And now, there’s a much wider range of substrates that you must be able to handle.” Meanwhile, in the fab, chipmakers use 193nm wavelength lithography systems to print tiny features. In packaging, ...