‡ IECB, ARNA Laboratory, Université de Bordeaux, F-33600 Pessac, France § UMR 5320, ARNA Laboratory, CNRS, F-33600 Pessac, France Article Views are the COUNTER-compliant sum of full text article ...

In particular, RF MEMS single ohmic series switches (SPST) have been obtained on silicon high resistivity substrates and they have been integrated in alumina packages to get single-pole-double-thru ...