This Document defines perfluoroalkoxy (PFA) resin and component preparation and pretreatment procedures for chemical test methods used to evaluate liquid chemical distribution system components and resin.

PFA with low extraction is critical when manufacturing leading-edge semiconductors. SEMI C90 establishes extraction requirements for PFA material and components used in chemical distribution systems and process tools.

PFA tubing meets SEMI F-57 certification for Ultrapure Water and Liquid Chemical Distribution Systems. Our Double Containment Tubing featuring a PFA inner tubing and a FEP outer tube has been developed for enhanced security while transferring caustic fluids.

Teflon® PFA tubing can handle higher temperatures than fluoropolymer tubing. Clear tubing allows you to easily monitor flow. Semi-clear tubing gives you a limited view inside the line. Semi-flexible tubing is good for gradual bends. Rigid tubing will not bend.

The Swagelok family of UHP fluoropolymer products includes pneumatically actuated and quarter-turn manual radial diaphragm-sealed shutoff valves, O-ring–free poppet check valves, and fine thread flare fittings. Swagelok products are backed by The Swagelok Limited Lifetime Warranty.

PFA primary containment provides universal chemical compatibility; Special blend PFA secondary containment offers improved chemical resistance at a lower cost, and enables easy visual inspection of primary tubing

CTA led the method development for SEMI C79, C93, F104 and F121. We provide these and other SEMI standard tests for fluid handling components, filtration, and ion exchange resin.

Aug 2, 2022 · To this end, we maintain SEMI F57 compliance for our customers PFA (Perfluoroalkoxy) and PTFE (polytetrafluoroethylene) injection molded products. SEMI F57 compliance is a specification for polymer materials and components used in ultrapure water and liquid chemical distribution systems.

This document defines sizes and their measurement methods of metric tetrafluoroethylene perfluoroalkylvinyl-ether copolymer (PFA) tubes for liquid chemical distribution in semiconductor and flat panel display manufacturing equipment and facilities.

Further information regarding UPW systems can be found in SEMI F61, SEMI F63. It also provides recommendations for the use of polymer materials and components used in UHP liquid chemical distribution systems (LCDS).